Facilities

The SVI lab is equipped with several sample preparation platforms and advanced sophisticated analysis tools:

High-temperature equipments

  • Glass-melting electrical furnaces
  • High-temperature (<1500°C) hot-stage

Deposition and fabrication techniques

  • Magnetron sputtering chamber “Misstic”, with three magnetrons and several in situ measurements during sputtering (stress measurement, SDRS, resistivity), connected to XPS chamber, LEED and annealing stage for in-situ monitoring
  • Photolithography
  • Zwick mechanical press for nano-imprinting

Microanalysis and spectroscopy (local measures)

  • Raman spectrometer equipped with an accurate translation stage compatible with high-resolution mapping
  • Atomic force microscope, compatible with large samples
  • In-situ XPS equipped with an ion sputtering gun for XPS profiles.

Optical measurements

  • Bidirectional reflectance distribution function (BRDF) measurement setup
  • High-resolution goniospectrophotometry

In addition, our researchers have direct access to some of the analysis tools of the SGR Paris environment:

  • Scanning electron microscopy (FEG-SEM) equipped with STEM mode
  • Optical measurements (ellipsometer, UV-Vis-NIR spectrophotometer including a module for angle-resolved measurements)
  • High speed camera
  • Industrial sputtering coaters for thin-film deposition
  • Furnace systems for controlled heat treatments
  • Laser systems for surface treatments and functionalization

On demand access to SGR Paris tools and external platforms:

  • SGR Lab:
    • Secondary ion mass spectroscopy (SIMS)
    • Electron microprobe (EMP), also known as an electron probe microanalyzer (EPMA)
    • State of the art X-ray diffraction tools
  • TEMPOS-NanoTEM, Orsay