in our laboratory :
- High-temperature equipments
- Glass-melting electrical furnaces
- High-temperature (<1500°C) hot-stage
- Deposition and fabrication techniques
- Magnetron sputtering chamber “Misstic”, with three magnetrons and several in situ measurements during sputtering (stress measurement, SDRS, resistivity), connected to XPS chamber
- Photolithography
- Zwick mechanical press for nano-imprinting
- Microanalysis and spectroscopy (local measures)
- Raman spectrometer, with accurate translations compatible with high-resolution mappings
- Atomic force microscope, compatible with large samples
- XPS, with ion sputtering gun for XPS profiles.
- FEG-SEM
- SIMS (SGR)
- Electron microprobe (SGR)
- Optical measurements
- High-resolution goniometer
- UV-Vis spectrometer (SGR)
- High speed camera