Advanced tools and characterization methods

Our activities are supported by advanced Raman spectroscopy, in-situ XPS, real-time characterization of sputtered materials, BRDF, AFM with hot plate, ...

  • Our Raman spectrometer equipped with accurate translation stages compatible with high-resolution mappings

ADVANCED RAMAN SPECTROSCOPY FOR HETEROGENEOUS SYSTEMS AND THIN FILMS

MISSTIC: A MULTI-TOOL PVD CHAMBER

At SVI we have developed over the years a vacuum system that combines in-situ several deposition sources (three sputtering sources and an evaporation cell) and varius characterization methods that can access the properties of the deposited layers both in real-time (surface reflectance, resistivity, stress) and after the deposition (XPS, UPS, LEED …).

Under the exotic name of MISSTIC, acronym for Multilayers and Interfaces Sputtered-deposition on STructured substrates and In-situ Characterization, the multi-tool is composed of two main chambers connected by a common load lock and transfer arms. It is also equipped for post deposition thermal annealing under controlled atmosphere, ion bombardment, electron beam furnace and oxygen shower.